US 6,472,268 B1Granted

Method for forming storage node contact

AssigneeHynix Semiconductor Inc.

InventorKyong-sik Yoo

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Abstract

In a method for forming a storage node contact, the inorganic SOG layer is deposited and heat-treated after forming a bit line having a conductive layer and a spacer on the semiconductor substrate and accordingly, there is an advantage that the density of the organic SOG layer embedded between the bit lines become lower than that of the organic SOG layer stacked on the bit lines. As a result, when performing the wet etching process, the speed for etching the inorganic SOG layer between the bit lines become very rapid, so that an artificial void is formed, an etching become very easier when performing a dry etching process of a deep storage node contact junction part. According to the present invention, the characteristic and yield of the semiconductor device become increased. Also, the present invention is very useful and effective because the high integration of the semiconductor device is possible.

Claims3

Dependent claims

A method for forming a storage node contact comprising the steps of:

forming a bit line on a semiconductor substrate having a predetermined lower structure;
depositing an inorganic SOG oxide layer on the resultant material and executing a thermal process;
depositing a photo resist layer on the inorganic SOG layer and then forming a photo resist pattern in order to intercept a part for forming a storage node contact and open the other part, thereafter etching the inorganic SOG oxide layer;
forming an artificial void by removing the inorganic SOG oxide layer filled between the bit lines by a wet etching process;
depositing a HDP oxide layer on the resultant material for isolating the storage node in order not to be embedded the void of the inorganic SOG oxide layer;
performing a planarization process of the resultant material by a CMP process and thereafter depositing a photo resist layer selectively and executing a masking etching process for forming a storage node contact, thereby forming the storage node contact connected to a plug poly.

3 more elements

Dependencies are inferred from the claim text.