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US 6,472,128 B2Granted
Antihalation compositions
AssigneeShipley Company, L.L.C.
InventorsJames W. Thackeray, George W. Orsula
Life of this patent
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Abstract
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
Claims16
A coated substrate comprising:
- a substrate having thereon:
- a coating layer of an antireflective composition, the antireflective composition comprising a crosslinker and an anthracene material;
- and
- a coating layer of a photoresist composition over the antireflective composition coating layer.
1 more element
A method for forming a relief image on a substrate comprising:
- applying on the substrate a layer of an antihalation composition comprising an anthracene material;
- applying over the antihalation composition coating layer a photoresist composition.
Dependencies are inferred from the claim text.