Control of solid state dimensional features

A method for controlling a physical dimension of a solid state structural feature comprising the steps of:

• providing a solid state structure having a surface and having a structural feature;
• and
• exposing the structure to a flux of ions at a selected structure temperature, ion flux exposure conditions being selected to cause transport, within the structure including the structure surface, of material of the structure to the structural feature in response to ion flux exposure to change at least one physical dimension of the feature substantially by locally adding material of the structure to the feature.

A method for fabricating a feature on a solid state structure comprising the steps of:

• providing a solid state structure having a surface;
• and
• exposing the structure to a flux of ions at a selected structure temperature, ion flux exposure conditions being selected to cause transport, within the structure including the structure surface, of material of the structure to a feature location in response to the ion flux exposure to produce the feature substantially by locally adding material of the structure to the feature location.

A method for controlling a dimension of a feature of a solid state structure comprising the steps of:

• providing a solid state structure having a surface and having a feature;
• and
• exposing the structure to a flux of ions at a selected structure temperature, ion flux exposure conditions being selected to cause transport, within the structure including the structure surface, of material of the structure to the feature in response to the ion flux exposure to change at least one dimension of the feature substantially by locally adding material of the structure to the feature.

A method for controlling a physical dimension of a solid state structural feature comprising the steps of:

• providing a solid state structure having a surface and having a structural feature with an edge boundary;
• and
• exposing the structure to a flux of ions at a selected structure temperature, ion flux exposure conditions being selected to cause transport, within the structure including the structure surface, of material of the structure to the structural feature edge boundary in response to the ion flux exposure to change at least one physical dimension of the feature substantially by locally adding material of the structure to the feature edge boundary.

A method for controlling a dimension of a feature of a solid state structure comprising the steps of:

• providing a solid state structure having a surface;
• forming in the solid state structure a feature;
• transporting, within the structure including the structure surface, material of the structure to the feature by exposure of the structure to a flux of ions to change at least one dimension of the feature substantially by locally adding material of the structure to the feature.

A method for controlling a physical dimension of a solid state structural feature comprising the steps of:

• providing a solid state structure having a surface;
• forming in the solid state structure a structural feature;
• transporting, within the structure including the structure surface, material of the structure to the feature by exposure of the structure to a flux of ions to change at least one physical dimension of the feature substantially by locally adding material of the structure to the feature.

A method for controlling a physical dimension of a solid state structural feature comprising the steps of:

• providing a solid state structure having a surface;
• forming in the solid state structure a structural feature having an edge boundary;
• transporting, within the structure including the structure surface, material of the structure to the feature edge boundary by exposure of the structure to a flux of ions to change at least one physical dimension of the feature substantially by locally adding material of the structure to the feature edge boundary.