Alkoxysilane/organic polymer composition for thin insulating film production and use thereof

An alkoxysilane/organic polymer composition for use in producing an insulating thin film, comprising:

• (A) at least one alkoxysilane selected from the group consisting of (1) tetraalkoxysilanes, (2) trialkoxysilanes, (3) dialkoxysilanes, (4) monoalkoxysilanes and (5) trialkoxysilane dimers, respectively, represented by the following formulae (1), (2), (3), (4) and (5):
• Si(OR)4 (1),
• R1Si(OR)3 (2),
• R1R2Si(OR)2 (3),
• R1R2R3SiOR (4),
• and
• (RO)3Si—R4—Si(OR)3 (5),
• wherein each R independently represents a straight chain or branched alkyl group having 1 to 6 carbon atoms, each of R1, R2 and R3 independently represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 6 carbon atoms, and R4 represents a divalent hydrocarbon group having 1 to 6 carbon atoms, and wherein, when said alkoxysilane (A) is at least one first alkoxysilane selected from the group consisting of said alkoxysilanes (3) and (4), said first alkoxysilane is used in combination with at least one second alkoxysilane selected from the group consisting of said alkoxysilanes (1), (2) and (5);
• (B) at least one organic polymer having a main chain mainly comprising at least one polymer chain selected from the group consisting of an, aliphatic polyether chain having ether group-containing recurring units having 2 to 12 carbon atoms, an aliphatic polycarbonate chain having carbonate group-containing recurring units having 2 to 12 carbon atoms and an aliphatic polyanhydride chain having anhydride group-containing recurring units having 2 to 12 carbon atoms;
• (C) a solvent for said alkoxysilane (A) and said organic polymer (B), wherein said solvent (C) comprises at least one organic solvent selected from the group consisting of amide linkage-containing organic solvents and ester linkage-containing organic solvents;
• and
• (D) at least one acid capable of functioning as a catalyst for promoting a hydrolysis and dehydration-condensation reaction of said alkoxysilane (A), wherein said acid is used in an amount of 1 mole or less, per mole of said alkoxysilane (A),
• and wherein at least a part of said alkoxysilane (A), which is at least one alkoxysilane selected from the group consisting of said alkoxysilanes (1) to (5), is optionally in at least one form selected from the group consisting of an oligomer form and an at least partially hydrolyzed form.