Method and apparatus to display processing parameter
AssigneeMicron Technology, Inc.
InventorRalph H. Schaeffer
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AssigneeMicron Technology, Inc.
InventorRalph H. Schaeffer
Estimating the term…
A system and method that provides various forms of graphic representations of test results of manufacturing process runs which can readily be shared with multiple users of the system is disclosed. A method for reporting a test process of a plurality of cells, wherein the test process is performed in a series of runs is disclosed. The method includes four steps. First, data regarding the test process for the plurality of cells is gathered. The data is accumulated over the series of runs. Next, the data is characterized to create a set of selected information. The set of selected information includes a subset of the data regarding the test process for the plurality of cells. The method also includes the steps of generating a user-consumable output of the set of selected information, and providing access to the data, the set of selected information, and the user-consumable output. The step of generating a user consumable output includes generating a map or generating a graph.
A method reporting the results of a test process of a plurality cells arranged on wafers, the method comprising:
A computer-executable medium having a plurality of modules stored thereon capable of causing an information handling system to operate in a particular manner, the plurality of modules comprising:
An information handling system, comprising:
A method reporting the results of a test process performed on a plurality of cells arranged on wafers over a series of manufacturing process runs, the method comprising:
A computer-executable medium having a plurality of modules stored thereon capable of causing an information handling system to operate in a particular manner, the plurality of modules comprising:
An information handling system, comprising:
Dependencies are inferred from the claim text.