US 6,445,967 B1Granted

Method and apparatus for controlling the use of chemicals with expiration dates

AssigneeInternational Business Machines Corporation

InventorsDavid Louis Travagline, Vishnu Vandana

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Abstract

A method and apparatus are provided for controlling the use of chemical materials in a semiconductor factory. The control is based upon the relationship among certain important dates relative to the useful life of the chemical materials used in the semiconductor manufacturing process. These dates include the current date and the expiration date, a critical date and a warning date for each chemical used on a particular assembly line. The expiration date is based upon a date beyond which the chemicals are not to be used in the semiconductor factory process. The critical date is usually no more than 3-4 days before the expiration date. Certain chemicals need more careful monitoring during this critical period. The warning date, usually a week before the expiration date, is used to alert the relevant engineering and production staff that a period of close attention on a particular production run is required. There are four major decision points in the method that is implemented by the apparatus.

Claims26

Dependent claims

A logic controller to control the use of chemical materials used in a manufacturing process comprising:

a data input module with data indicating a first date, a second date, a third date, and a fourth date wherein second, third and fourth dates are progressively later in time;
a first data selection circuit, wherein said data selection circuit determines if said first date is prior to said second date and further wherein said first data selection process instructs said manufacturing process to continue if said first date is prior to said second date;
a second data selection circuit, wherein if said first data selection circuit determines is said first date is later than said second date, said second data selection circuit determines is said first date is prior to said third date and further wherein said second data selection circuitry instructs said manufacturing process to continue if said first date is prior to said third date and activates a first call warning circuit;
a third data selection circuit, wherein if said second data selection circuit determines if said first date is later than said third date, said third data selection circuit determines if said first date is later than or equal to said fourth date and further wherein said third data selection circuitry instructs said manufacturing process to stop if said first date is later than or equal to said fourth date and activates a second call warning circuit and further wherein if said third selection circuitry determines that said fourth date is earlier than said first date it activates a third call warning circuit and prompts for a manual override signal to permit said process to continue after said third date and before said first date;
and
a requeue selection circuit, wherein said requeue permits said process to continue if said first date is earlier than said second date, said first date is earlier than said third date, or said first date is earlier than said fourth date and said manual override is activated and further wherein said requeue selection orders a stopping of said process when said first date is equal to or later than said fourth date or said manual override is not activated.

3 more elements

A computer usable medium having computer readable program code means embodied therein for controlling the use of chemical materials used in a manufacturing process, said medium comprising:

computer readable program code means for causing a computer to store data indicating a first date, second date;
a third date, and a fourth date, wherein said second, third and fourth dates are progressively later in time;
computer readable program code means for causing a computer to perform a first data selection, wherein said data selection determines if said first date is prior to said second date and further wherein said first data selection process instructs said manufacturing process to continue if said first date is prior to said second date;
computer readable program code means for causing a computer to perform a second data selection, wherein if said first data selection determines said first date is later than said second date, said second data selection determines if said first date is prior to said third date and further wherein said second data selection instructs said manufacturing process to continue if said first date is prior to said third date and activates a first call warning circuit;
computer readable program code means for causing a computer to perform a third data selection, wherein if said second data selection determines if said first date is later than said third date, said third data selection determines if said first date is later than or equal to said fourth date and further wherein said third data selection instructs said manufacturing process to stop if said first date is later than or equal to said fourth date and activates a second call warning circuit and further wherein if said third selection determines that said fourth date is earlier than said first date it activates a third call warning circuit and prompts a manual override signal to permit said process to continue after said third date and before said first date;
and
computer readable program code means for causing a computer to perform a requeue decision, wherein said requeue decision permits said process to continue if said first date is earlier than said second date, said first date is earlier than said third date, or said third date is earlier than said fourth date and said manual override is activated and further wherein said requeue selection orders a stopping of said process when said first date is equal to or later than said fourth date or said manual override is not activated.

4 more elements

A method for controlling use of chemical materials in a manufacturing process comprising:

entering data input indicating a first date, second date;
a third date and a fourth date, wherein said second, third and fourth dates are progressively later in time;
determining if said first date is prior to said second date and further wherein this first data selection instructs said manufacturing process to continue if said first date is prior to said second date;
determining if said first data selection determines if said first date is later than said second date, a second data selection determines if said first date is prior to said third date and said second data selection instructs said manufacturing process to continue if said first date is prior to said third date and a first call warning circuit is activated;
determining if said second data selection determines if said first date is later than said third date, a third data selection circuit determines if said first date is later than or equal to said fourth date and said third data selection instructs said manufacturing process to stop if said first date is later than or equal to said fourth date and activates a second call warning circuit and if said third selection circuitry determines that said fourth date is earlier than said first date a third call warning circuit is activated and a manual override signal to permit said process to continue after said third date and before said first date is prompted;
and
instructing process to continue if said first date is earlier than said second date, said first date is earlier than said third date, or said first date is earlier than said fourth date and said manual override is activated;
and
instructing said process to stop when said first date is equal to or later than said fourth date.

6 more elements

A program storage device readable by a machine, tangibly embodying a program of instructions executable by said machine to perform method steps for controlling use of chemical materials in a semiconductor manufacturing process, said method steps comprising:

entering data input indicating a first date, second date;
a third date, and a fourth date, wherein said second, third, and fourth dates are progressively later in time;
determining is said first date is prior to said second date and further wherein this first data selection instructs said manufacturing process to continue if said first date is prior to said second date;
determining if said first data selection determines if said first date is later than said second date, a second data selection determines if said first date is prior to said third date and said second data selection instructs said manufacturing process to continue if said first date is prior to said third date and a first call warning circuit is activated;
determining is said second data selection determines if said first date is later than said third date, a third data selection circuit determines if said first date is later than or equal to said fourth date and said third data selection instructs said manufacturing process to stop if said first date is later than or equal to said fourth date and activates a second call warning circuit and if said third selection circuitry determines that said fourth date is earlier than said first date a third call warning circuit is activated and a manual override signal to permit said process to continue after said third date and before said first date is prompted;
and
instructing process to continue if said first date is earlier than said second date, said first date is earlier than said third date, or said first date is earlier than said fourth date and said manual override is activated;
and instructing
said process to stop when said first date is equal to or later than said fourth date.

6 more elements

A computer program product for controlling use of chemical materials in a semiconductor manufacturing process, said computer program product comprising:

a computer usable medium having computer readable program code means embodied in said medium for controlling use of chemical materials in a semiconductor fabrication process, said computer program product having computer readable program code means for entering data input indicating a first date, second date;
a third date, and a fourth date, wherein said second, third, and fourth dates are progressively later in time;
computer readable program code means for determining is said first date is prior to said second date and further wherein this first data selection instructs said manufacturing process to continue if said first date is prior to said second date;
computer readable program code means for determining if said first data selection determines if said first date is later than said second date, a second data selection determines if said first date is prior to said third date and said second data selection instructs said manufacturing process to continue is said first date is prior to said third date and a first call warning circuit is activated;
computer readable program code means for determining if said second data selection determines if said current date is later than said third date, a third data selection circuit determines if said first date is later than or equal to said fourth date and said third data selection instructs said manufacturing process to stop if said first date is later than or equal to said fourth date and activates a second call warning circuit and if said third selection circuitry determines that said fourth date is earlier than said first date a third call warning circuit is activated and a manual override signal to permit said process to continue after said third date and before said first date is prompted;
and computer readable program code means for instructing process to continue if said first date is earlier than said second date, said first date is earlier than said third date, or said first date is earlier than said fourth date and said manual override is activated;
and
computer readable program code means for instructing said process to stop when said first date is equal to or later than said fourth date.

5 more elements

Dependencies are inferred from the claim text.