Projection-microlithographic device
AssigneeCarl-Zeiss-Stiftung
InventorsRudolf Von Bünau, Jörg Schultz, Johannes Wangler
Life of this patent
Estimating the term…
Loading patent…
AssigneeCarl-Zeiss-Stiftung
InventorsRudolf Von Bünau, Jörg Schultz, Johannes Wangler
Estimating the term…
An illuminating device of a projection-microlithographic device includes a light source, an objective, and a device which produces a particular image field configuration. The device has fields which, in the direction of scanning movement, are separated at least in parts by a free zone, and are located in a peripheral region of the circular image field of a downstream projection objective in a manner at least approximating rotation symmetry. The integral of the quantity of light passing through the fields in the scanning direction are constant over the entire extent of the image field configuration in the direction at right angles to the scanning direction. Such an image field configuration replaces a conventional rectangular scanner slot formation whose width in the scanning direction corresponds to the forementioned integral of the image field configuration. The design of the image field configuration permits an approximately rotationally symmetric illumination of the projection objective.
A projection-microlithographic apparatus comprising:
A projection-microlithographic device comprising:
Dependencies are inferred from the claim text.