Focussing method and system of exposure apparatus

A focussing method for confirming two or more foci on a semiconductor wafer in an exposure apparatus, the semiconductor wafer having a stack structure and a coating of a photoresist layer, the focussing method comprising:

• transmitting a light to the semiconductor wafer for detecting a focus, wherein the light is transmitted at an incident angle at which an amount of light reflected from a surface of the photoresist layer is larger than an amount of light penetrating a surface of the photoresist layer;
• detecting the light reflected from the surface of the photoresist layer;
• and
• controlling a position of the semiconductor wafer in response to the light detected and confirming two or more foci, wherein a consistent focus is obtained in a fixed area of the semiconductor wafer;
• wherein the focussing method confirms four foci when the semiconductor wafer is in a scanning state, a first pair of the four foci defining one line, and a second pair of the four foci defining a second line which intersects the first line perpendicularly at a center point of the first line.

A focussing system for confirming two or more foci on a semiconductor wafer in an exposure apparatus, the semiconductor wafer having a stack structure and a coating of a photoresist layer, the focussing system comprising:

• a source part for creating and transmitting a light to the semiconductor wafer at an incident angle at which an amount of light reflected from the photoresist layer is larger than an amount of light penetrating a surface of the photoresist layer;
• a detection part for detecting light reflected from the surface of the photoresist layer and then generating a detection signal;
• and
• a control part for controlling a position of the semiconductor wafer in response to the detection signal generated and confirming two or more foci, wherein a consistent focus is obtained in a fixed area of the semiconductor wafer;
• wherein the source part comprises three light generating elements and the detection part comprises three light receiving elements corresponding to the light generating elements of the source part, respectively, wherein the three light generating elements emit light which is incident on the surface of the photoresist layer at three foci, the three foci being disposed relative to one another such that two of the three foci define a line on the surface of the photoresist layer, and a third of the three foci is offset perpendicular to a center point of that line by a predetermined distance, thereby confirming three foci when the semiconductor wafer is in a paused state.

A focussing system for confirming two or more foci on a semiconductor wafer in an exposure apparatus, the semiconductor wafer having a stack structure and a coating of a photoresist layer, the focussing system comprising:

• a source part for creating and transmitting a light to the semiconductor wafer at an incident angle at which an amount of light reflected from the photoresist layer is larger than an amount of light penetrating a surface of the photoresist layer;
• a detection part for detecting light reflected from the surface of the photoresist layer and then generating a detection signal;
• and
• a control part for controlling a position of the semiconductor wafer in response to the detection signal generated and confirming two or more foci, wherein a consistent focus is obtained in a fixed area of the semiconductor wafer;
• wherein the source part comprises four light generating elements and the detection part comprises four light receiving elements corresponding to the light generating elements of the source part, respectively, wherein the four light generating elements emit light which is incident on the surface of the photoresist layer at four foci, the four foci being disposed relative to one another such that a first pair of the four foci define one line, and a second pair of the four foci define a second line which intersects the first line perpendicularly at a center point of the first line, thereby confirming four foci when the semiconductor wafer is in a scanning state.

A method of focussing an optical system of an exposure apparatus on a photoresist layer of a semiconductor wafer having a multi-layered structure coated by the photoresist layer;

• said method comprising
• transmitting light onto the upper surface of the photoresist layer, wherein said transmitting comprises directing two discrete beams of light onto the upper surface at first and second spaced-apart locations thereon representing two foci, respectively, and each at an angle of incidence that causes more of the beam of light to be reflected at said surface than refracted by the photoresist;
• detecting the beams of light reflected from said locations on the upper surface of the photoresist layer, respectively;
• and
• controlling the position of the semiconductor wafer relative to the optical system of the exposure apparatus in response to the detecting of the reflected light;
• wherein the transmitting of the light onto the upper surface of the photoresist layer is carried out while the semiconductor wafer is held still, and further comprises directing a third beam of light onto the upper surface of the photoresist layer at a third location offset perpendicular from the center of a line connecting said first and second locations.

A method of focussing an optical system of an exposure apparatus on a photoresist layer of a semiconductor wafer having a multi-layered structure coated by the photoresist layer, ad method comprising:

• transmitting light onto the upper surface of the photoresist layer, wherein said transmitting comprises directing two discrete beams of light onto the upper surface at first and second spaced-apart locations thereon representing two foci, respectively, and each at an angle of incidence that causes more of the beam of light to be reflected at said surface than refracted by the photoresist;
• detecting the beams of light reflected from said locations on the upper surface of the photoresist layer, respectively;
• controlling the position of the semiconductor wafer relative to the optical system of the exposure apparatus in response to the detecting of the reflected light;
• and
• scanning the transmitted light across the upper surface of the photoresist layer;
• wherein he transmitting of the light onto the upper surface of the photoresist layer further comprises directing third and fourth beams of light onto the upper surface of the photoresist layer at third and fourth locations spaced apart from one another along a second line perpendicular to and intersecting the center of a first line connecting said first and second spaced-apart locations.

In combination with an exposure apparatus having an optical system for exposing a substrate and a stage used to support the substrate during its exposure, a focussing system comprising:

• a source part that produces first and second discrete beams of light and transmits the beams of light toward the stage generally parallel to one another in such directions that the beams of light each subtend an angle in a range of about 75° to about 90° with respect to a plane normal to an upper surface of said stage, wherein the first and second beams of discrete light will impinge a substrate, supported on the stage, at first and second spaced-apart locations thereon representing two foci, respectively;
• a detection part positioned to detect the fist and second beams of light reflected from the substrate supported on the stage;
• and
• a processor operatively connected to said detection part and to said stage so as to control the position of said stage based on the detection of the light by said detection part;
• wherein said source part comprises first, second and third discrete light sources, and said detection part comprises three light detectors associated with said light sources, respectively, said first and second discrete light sources producing said first and second beams of light, respectively, said third light source producing a third beam of light, and said source part directing the third beam of light toward said stage in such a direction that the third beam of light will impinge the substrate, supported on the stage, at a third location offset perpendicular from the center of a line connecting said first and second locations.

In combination with an exposure apparatus having an optical system for exposing a substrate and a stage used to support the substrate during its exposure, a focussing system comprising:

• a source part that produces first and second discrete beams of light and transmits the beams of light toward the stage generally parallel to one another in such directions that the beams of light each subtend an angle in a range of about 75° to about 90° with respect to a plane normal to an upper surface of said stage, wherein the first and second beams of discrete light will impinge a substrate, supported on the stage, at first and second spaced-apart locations thereon representing two foci, respectively;
• a detection part positioned to detect the first and second beams of light reflected from the substrate supported on the stage;
• and
• a processor operatively connected to said detection part and to said stage so as to control the position of said stage based on the detection of the light by said detection part;
• wherein said source pat comprises first, second, third and fourth discrete light sources, and said detection part comprises four light detectors associated with said light sources, respectively, said first and second discrete light sources producing said first and second beams of light, respectively, said third and fourth light sources producing third and fourth discrete beams of light, and said source part directing the third and fourth beams of light toward said stage in such directions that the third and fourth beams of light will impinge the substrate, supported on the stage, at third and fourth locations spaced apart from one another along a second line perpendicular to and intersecting the center of a first line connecting said first and second spaced-apart locations.