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US 6,444,135 B1Granted
Method to make gas permeable shell for MEMS devices with controlled porosity
AssigneeBall Semiconductor, Inc.
InventorsMurali Hanabe, Risaku Toda
Life of this patent
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Abstract
A method and system for making a gas permeable shell in a micro electromechanical systems (MEMS) device is disclosed. The MEMS device is created with an internal sacrificial layer. The device is then coated with a slurry composition which, after drying, is later exposed to a solvent. As a result, the sacrificial layer is removed to produce interconnected voids.
Claims10
A method for making a gas permeable shell around a small electro/mechanical device, the method comprising the steps of:
- dissolving a first solid in a solvent to form a solution;
- mixing the solution with a second solid to form a slurry;
- coating the electro/mechanical device with the slurry to form a coated electro/mechanical device;
- drying the coated electro/mechanical device;
- and
- exposing the coated electro/mechanical device to the solvent to re-dissolve the first solid.
3 more elements
A method for making a gas permeable shell around a micro electro-mechanical systems (MEMS) device, comprising the steps of:
- dissolving a first solid in a solvent to form a solution;
- mixing the solution with a second solid to form a slurry;
- coating the MEMS device with the slurry to form a coated MEMS device;
- drying the coated MEMS device;
- exposing the coated MEMS device to the solvent to re-dissolve the first solid.
2 more elements
Dependencies are inferred from the claim text.