Apparatus for depositing CdS and CdTe layers on substrates by means of a CSS process
AssigneeANTEC Solar GmbH
InventorsRainer Gegenwart, Hilmar Richter
Life of this patent
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Abstract
Apparatus for depositing substrates by means of a CSS process comprising a heated receptacle (20) for a supply (70) of material to be deposited and carrier means for holding the substrate (60) with its side to be deposited towards an opening (22) of said receptacle, said receptacle opening (22) being provided with a cover (30) including a plurality of through-holes (32) for the sublimated material, said cover separating said material supply (70) from said substrate (60) and, due to being heated to a temperature higher than that of said receptacle (20), acting as sublimation source for said substrate.
Claims16
An apparatus for depositing CdS and CdTe layers on a substrate by means of a CSS process, said apparatus comprising:
- a heated receptacle having an opening, said receptacle being heated to a first temperature;
- an initially fixed volume of material supply disposed in said receptacle, and selected from a group consisting of CdS and CdTe, wherein said heated receptacle sublimates said material supply to form a sublimated material which exits said receptacle through said opening to decrease said initially fixed volume of material supply;
- a heated plate covering said opening, and including a plurality of through-holes through which said sublimated material passes, said plate being heated to a second temperature which is higher than said first temperature to form a sublimation source;
- a substrate disposed outside of said receptacle and having a face facing said plate for receiving said sublimated material, said face being spaced a distance between about 2 and about 50 mm from said plate.
Dependencies are inferred from the claim text.