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US 6,444,042 B1Granted
Gas injection system for chemical vapor deposition device
AssigneeHyundai Electronics Industries Co., Ltd.
InventorsSeung Yoon Yang, In Jae Park, Jong Woo Yoon, Chang Jae Kim, Tanigawa Eiki
Life of this patent
Estimating the term…
Abstract
A gas injection system for a chemical vapor deposition device includes a gas providing pipe providing gases into the system, a shower head unit coupled to the gas providing pipe for evenly injecting the gases on a wafer, and a temperature control unit coupled to the shower head unit for controlling a temperature of the shower head unit.
Claims25
A gas injection system for a chemical vapor deposition device, comprising:
- a gas providing pipe providing gases into the system;
- a shower head unit including a heat transmitting member, a distribution plate, and a nozzle plate coupled to the gas providing pipe for evenly injecting the gases on a wafer;
- and
- a temperature control unit coupled to the shower head unit for controlling a temperature of the shower head unit,
- wherein the distribution plate includes a first plurality of continuous rectangular grooves formed on a first surface of the distribution plate along a first direction, and a second plurality of continuous rectangular grooves formed on a second surface opposite to the first surface of the distribution plate along a second direction perpendicular to the first direction, wherein a total number of the first plurality of continuous rectangular grooves is greater than a total number of the second plurality of continuous rectangular grooves.
2 more elements
A gas injection system for a chemical vapor deposition device, comprising:
- a gas providing pipe providing gases into the system;
- a shower head unit including a heat transmitting member, a distribution plate, and a nozzle plate coupled to the gas providing pipe for evenly injecting the gases on a wafer;
- a heating system coupled to the shower head unit for controlling a temperature of the shower head unit;
- a cooling system coupled to the heating system for controlling a temperature of the heating system;
- and
- a temperature sensor coupled to the shower head unit,
- wherein the temperature sensor is provided in a straight line from an upper surface of the distribution plate to within a bottom surface of the nozzle plate by 2 mm.
4 more elements
Dependencies are inferred from the claim text.