Dual fritted bubbler
AssigneeMorton International, Inc.
InventorsSri Prakash Rangarajan, John O'Grady
Life of this patent
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Abstract
A dual chambered bubbler vessel for use with solid organometallic source material for chemical vapor phase deposition systems, and a method for transporting a carrier gas saturated with source material for delivery into such systems. The bubbler vessel is designed so that carrier gas enters through an inlet in the top thereof into an inlet chamber and after it has been saturated with the organometallic vapors exits through a first porous frit located in the floor of the inlet chamber into an outlet chamber and is withdrawn from the bubbler after passing through a second porous frit element located at the outlet of the bubbler.
Claims11
A device for feeding a fluid stream saturated with organometalic compound material to a chemical vapor deposition system comprising,
- a vessel comprising an elongated cylindrical shaped portion having an inner surface defining a substantially constant cross section throughout the length of said cylindrical portion, a top closure portion and a bottom closure portion, said top closure portion having an inlet opening for the introduction of carrier gas and an outlet opening, said elongated cylindrical shaped portion having inlet and outlet chambers in fluid communication wherein the floor of said inlet chamber is spaced from said bottom closure portion, the floor of said inlet chamber comprising a first porous element which allows vapors generated in said inlet chamber to pass into said outlet chamber, wherein said inlet opening is in fluid communication with said inlet chamber and said outlet opening is in fluid communication with said outlet chamber, wherein said inlet opening is in fluid communication with said inlet chamber and said outlet opening is in fluid communication with said outlet chamber,
- a source of solid organometallic precursor compound contained within said inlet chamber of said vessel,
- said device further comprising a second porous element located at said outlet opening, whereby said fluid stream exits said vessel by passing through said porous element.
A dual chambered bubbler containing solid precursors for use in a vapor deposition process comprising:
- a closed cylindrical vessel having top and bottom portion with inlet and an outlet ports located in the said top portion of said vessel through which carrier gas enters and exits the bubbler,
- said vessel comprising an inlet chamber terminating in a floor spaced from the vessel bottom for housing the solid precursors,
- a first porous element located in said floor of said inlet chamber,
- an outlet chamber in fluid communication with said inlet chamber, and
- a second porous element located at the outlet port of said outlet chamber.
Dependencies are inferred from the claim text.