Ferroelectric and paraelectric thin film devices using dopants which eliminate ferroelectricity
AssigneeTexas Instruments Incorporated
InventorsTheodore S. Moise, Stephen R. Gilbert, Charles D. E. Lakeman, Scott R. Summerfelt, Stacey A. Yamanaka
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Abstract
A method for simultaneously producing areas of paraelectric states and areas of ferroelectric states on a single thin film layer, thereby reducing the number of processing steps required to produce integrated chips containing both standard capacitors and non-volatile memory devices from the number of steps needed using the conventional approach. A device containing both ferroelectric capacitors and non-ferroelectric capacitors using a single thin film as the dielectric.
Claims5
An integrated chip comprising a dielectric layer formed from a single thin film dielectric layer containing both ferroelectric areas and paraelectric areas, wherein said dielectric layer in said paraelectric areas also contains dopants which eliminate ferroelectricity.
An integrated chip containing both non-ferroelectric capacitor devices and ferroelectric memory devices, wherein the dielectric for both said non-ferroelectric capacitor devices and said ferroelectric memory devices is formed from a single thin-film dielectric layer, and wherein said dielectric layer in said non-ferroelectric capacitor devices also contains dopants which eliminate ferroelectricity .
Dependencies are inferred from the claim text.