Polymeric compound and resin composition for photoresist
AssigneesKabushiki Kaisha Toshiba, Daicel Chemical Industries, Ltd.
InventorsToru Ushirogouchi, Takeshi Okino, Koji Asakawa, Naomi Shida, Yoshinori Funaki, Kiyoharu Tsutsumi, Akira Takaragi, Keizo Inoue
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