Indexer for magazine shelves of a magazine and wafer-shaped objects contained therein
AssigneeJenoptik Aktiengesellschaft
InventorsVolker Schlehahn, Klaus Schultz
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AssigneeJenoptik Aktiengesellschaft
InventorsVolker Schlehahn, Klaus Schultz
Estimating the term…
An indexer for magazine shelves of a magazine and wafer-shaped objects contained therein has the object of ensuring accurate access in any desired and predeterminable magazine plane, also for magazines which are provided with an opening on only one removing and charging side, by means of an all-purpose indexing, wherein it is possible to differentiate between various standardized magazine and wafer formats. The magazine shelves and the wafer-shaped objects are detected by an optoelectronic sensor arrangement, at least a portion of which is designed as a distance measuring system. The indexer is applicable in the manufacture of integrated circuits, in particular, for handling wafer-shaped objects in the form of semiconductors and masks.
An indexer for magazine shelves of a magazine and the wafer-shaped objects contained therein, the magazine and a first handling plane for removing and charging the objects being adjustable vertically relative to one another for the processing of such wafer-shaped objects, the indexer having an optoelectronic sensor arrangement for detecting the objects and magazine shelves relative to a reference plane which is in a fixed relationship to the first handling plane,
Dependencies are inferred from the claim text.