SOI wafer device and a method of fabricating the same
AssigneeHyundai Electronics Industries Co., Ltd.
InventorJeong Hee Oh
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AssigneeHyundai Electronics Industries Co., Ltd.
InventorJeong Hee Oh
Estimating the term…
The present invention discloses a SOI device capable of removing a floating body effect and improving a static electricity emission characteristic and a method of fabricating the same. The SOI device according to the present invention, comprising: a base substrate; a buried oxide layer formed to expose a predetermined region of the base substrate on the base substrate; a body contact layer formed to the same thickness as the buried oxide layer on the exposed base substrate region; a body layer of a transistor formed on the buried oxide layer and the body contact layer; a gate having a gate oxide layer formed on the body layer; and a drain region and a source region formed in a depth contacting with the buried oxide in the body layer region at both sides of the gate, the source being in contact with the body contact layer.
A SOI device comprising:
Dependencies are inferred from the claim text.