Radiation sensitive resin composition and use of the same in an interlaminar insulating film

A radiation sensitive resin composition comprising:

• (A) a copolymer obtained by copolymerizing (a1) at least one carboxylic acid compound selected from the group consisting of an unsaturated carboxylic acid and an unsaturated carboxylic anhydride, (a2) at least one unsaturated epoxy compound selected from the group consisting of a monomer represented by the following formula (1):
• wherein R is a hydrogen atom or methyl group, R1 is an alkyl group having 1 to 4 carbon atoms, and n is an integer of 1 to 6,
• and a monomer represented by the following formula (2):
• whereinR2 is a hydrogen atom or methyl group, p is an integer of 1 to 6, and q is an integer of 1 to 6,
• and (a3) an olefinic unsaturated compound other than the above (a1) and (a2);
• and
• (B) a 1,2-quinonediazide compound.