US 6,397,990 B1 · Materials transport system having inductive power transfer

Abstract

An inductive power transfer apparatus is provided which is especially useful for a semiconductor wafer handling system or other similar type of materials transport system in which one or more cars are moveable along a track. The system includes a plurality of elongated primary coils each disposed at an intended position along the track. Each of the moveable cars has one or more pick-up or secondary coils which are coupled to the primary coil when the car comes into position along the track. A secondary coil or coils on the car provides power to a battery charging circuit for so long as the secondary is in coupling relationship with the primary or for so long as needed to provide an intended charge to the on board batteries. A drive circuit for the primary coil may be located near the primary coil or alternatively, a single drive circuit can be at a central location to provide drive signals to a plurality of primary coils. The drive circuit can be activated by sensing the presence of a secondary coil in coupling position with the primary coil. The charge current can be controlled to suit the characteristics or charge status of the batteries.

Claims26

Dependent claims

An inductive power transfer apparatus for coupling electrical energy between a first position along a travel path and a unit which is moveable along the travel path, the apparatus comprising:

an elongated primary coil disposed at a first position along the travel path and having an unobstructed coupling path;
the unit moveable along the travel path, the unit having a secondary coil which when in the first position is in coupling relationship with the elongated primary coil at the unobstructed coupling path and the unit having an on-board rechargeable energy source directly electrically connected to a charging circuit, the charging circuit further coupled to the secondary coil, the on-board rechargeable energy source directly electrically connected to a motor, to provide the power thereto, wherein the motor is operative to move the unit along the travel path to provide the power thereto;
a drive circuit operative in response to DC power to provide drive signals to the primary coil to induce a charging current in the secondary coil when the secondary coil is coupled to the primary coil;
and
the secondary coil being operative to provide the charging current to the charging circuit in response to energy provided by the primary coil when in coupling relationship with the secondary coil, wherein the charging circuit charges the on-board rechargeable energy source in response to the charging current.

2 more elements

For use in a semiconductor wafer transport system having a track disposed along a predetermined path and one or more cars moveable along the track for movement of wafers to successive work stations and wherein each of the cars has at least one battery powered motor thereon for propulsion of the car along the track and for powering on-board circuitry on the car, an inductive power transfer apparatus for coupling electrical power from one or more positions along the track to the one or more cars, said apparatus comprising:

a primary coil disposed at each of one or more positions along a travel path;
the car moveable along the travel path, the car having a secondary coil which when in the one or more positions is in coupling relationship with the primary coil and the car having a battery source directly electrically connected to a charging circuit, the charging circuit coupled to the secondary coil, the battery source directly electrically connected to the battery powered motor to provide power thereto;
a drive circuit operative in response to DC power to provide drive signals to the one or more primary coils to induce a charging current in the secondary coil when coupled to the primary coil;
and
the secondary coil being operative to provide the charging current to the charging circuit in response to energy provided by the primary coil when in coupling relationship with the secondary coil, wherein the battery source is charged by the charging circuit in response to the charging current.

2 more elements

Dependencies are inferred from the claim text.

Materials transport system having inductive power transfer

Life of this patent

Materials transport system having inductive power transfer

Life of this patent

Abstract

Claims26