Semiconductor device and semiconductor device manufacture method

Abstract

There is disclosed a semiconductor device in which trenches are formed at predetermined intervals on a silicon substrate. In each trench, a first silicon oxide film is formed with the upper region of the first silicon oxide film protruding from a main substrate surface. A second silicon oxide film is formed from a boundary of the upper region in the first silicon oxide film and substrate over to the substrate surface. The height of the second silicon oxide film from the substrate surface is smaller than that of the upper region from the substrate surface. An active region is defined/formed on the substrate surface by an isolating film formed of the first and second silicon oxide films. A gate oxide film is formed on an active region surface, and a gate electrode is formed on the gate oxide film and extended from the active region over to the upper part of the isolating film.

Dependencies are inferred from the claim text.