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US 6,388,299 B1Granted
Sensor assembly and method
AssigneeHoneywell Inc.
InventorsJoon-Won Kang, Kelly J. Simonette
Life of this patent
Estimating the term…
Abstract
A sensor device that provides a relatively uniform electric field between a diaphragm and a substrate, regardless of the displacement of the diaphragm is disclosed. The sensor device provides a uniform spacing between the diaphragm and the substrate over a selected range of diaphragm displacements. A double layer diaphragm is disclosed that includes an upper support member and a lower electrode plate. The lower electrode plate is attached to the upper support member by a post member, and the post member is only attached to the center region of the support member. In another embodiment, an electro-mechanically controlled switch sensor is provided that uses an electrostatic force between the diaphragm and the substrate to produce a bi-stable snapping action.
Claims37
A sensor assembly for sensing an externally generated force, comprising:
- a substrate having an upper surface;
- electrode means positioned above at least a portion of the upper surface of the substrate, the electrode means being mounted such that a movable portion of the electrode means moves toward or away from the substrate when the sensor assembly is subjected to the externally generated force;
- the movable portion of the electrode means having a support portion and an electrode portion, wherein the support portion and the electrode portion are non-planar, the support portion at least partially deforming as the movable portion of the electrode means moves toward or away from the substrate, and the electrode portion remaining substantially undeformed as the movable portion of the electrode means moves toward or away from the substrate, the electrode portion having a lower surface that faces the upper surface of the substrate, the lower surface of the electrode portion and the upper surface of the substrate remaining substantially parallel as the movable portion of the electrode means moves toward or away from the substrate in response to the externally generated force;
- at least one terminal electrically connected to the substrate;
- and
- at least one terminal electrically connected to the electrode means.
3 more elements
A sensor assembly for sensing an externally generated force, comprising:
- a substrate having an upper surface;
- a support member positioned above at least a portion of the upper surface of the substrate, the support member being mounted such that a first portion of the support member moves toward or away from the substrate more than a second portion of the support member when the support member is subjected to the externally generated force;
- an electrode plate having a lower surface that faces the upper surface of the substrate, the electrode plate being operatively attached below the first portion of the support member such that the lower surface of the electrode plate moves substantially uniformly toward or away from the upper surface of the substrate when the support member is subjected to the externally generated force;
- at least one terminal electrically connected to the substrate;
- and
- at least one terminal electrically connected to the electrode plate.
3 more elements
A sensor transistor, comprising:
- a substrate having an upper surface;
- a source implant region in the upper surface of the substrate;
- a drain implant region in the upper surface of the substrate, the source implant region being spaced from the drain implant region by a gap region;
- a gate means positioned above at least a portion of the gap region, at least a portion of the gate means moving toward or away from the substrate in response to an externally generated force applied to the gate means, the gate means having a support portion and an electrode portion, wherein the support portion and the electrode portion are non-planar, the support portion at least partially deforming as the at least a portion of the gate means moves toward or away from the substrate, and the electrode portion remaining substantially undeformed as the at least a portion of the gate means moves toward or away from the substrate, the electrode portion having a downward facing surface that remains substantially parallel to the upper surface of the substrate even when the gate means moves in response to the externally generated force;
- at least one terminal electrically connected to the source implant;
- at least one terminal electrically connected to the drain implant;
- and
- at least one terminal electrically connected to the gate means.
5 more elements
A sensor assembly for sensing an externally generated force, comprising:
- a substrate having an upper surface;
- a diaphragm positioned above at least a portion of the upper surface of the substrate, the diaphragm including a support member positioned above an electrode plate, wherein at least one post member connects the electrode plate and the support member, the electrode plate being spaced from the support member and from the substrate;
- at least one terminal electrically connected to the substrate;
- and
- at least one terminal electrically connected to the electrode plate.
2 more elements
A sensor assembly for sensing an externally generated force, comprising:
- a plate having an upper surface;
- electrode means positioned above at least a portion of the upper surface of the plate, the electrode means being mounted such that a movable portion of the electrode means moves relative to the plate when the sensor assembly is subject to the externally generated force, the electrode means including a support portion and an electrode portion, wherein the support portion and the electrode portion are non-planar, the support portion at least partially deforming as the movable portion of the electrode means moves toward or away from the substrate, and the electrode portion remaining substantially undeformed as the movable portion of the electrode means moves toward or away from the substrate, said electrode means providing a deformation force opposite to the externally generated force;
- a first terminal electrically connected to the plate;
- a second terminal electrically connected to the electrode means;
- and
- said electrode means and said plate having an electrostatic force therebetween when a voltage is applied between the first terminal and the second terminal, the electrostatic force increasing as the electrode means moves closer to the plate, the electrode means snapping toward the plate when the externally generated force and the electrostatic force overcome the deformation force.
3 more elements
Dependencies are inferred from the claim text.