Low loss capacitor structure
AssigneeTexas Instruments Incorporated
InventorCharles Francis Clark
Life of this patent
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Abstract
A capacitor structure (100) including first and second capacitor plates (102, 106) insulatingly spaced from each other by a capacitor dielectric (102). A first set of conductive posts (301) electrically couple to the first capacitor plate (102) and extend away from the capacitor dielectric (104). A first conductive structure (302) comprising a material with lower resistivity than the first capacitor plate (102) is electrically coupled to the first set of conductive posts (301). In a preferred embodiment, a second set of conductive posts (501) are electrically coupled to the second capacitor plate (106) and extend away from the capacitor dielectric (102). A second conductive structure (503) is electrically coupled to the second set of conductive posts (501).
Claims5
A method for forming a capacitor comprising the steps of:
- providing a substrate;
- forming a first capacitor plate on the substrate;
- forming a capacitor dielectric over the first capacitor plate;
- forming a second capacitor plate over the first capacitor plate and separated from the first capacitor plate by the capacitor dielectric;
- covering the second capacitor plate with a first dielectric;
- forming a first set of vias in the first dielectric extending through the second capacitor plate to expose portions of the first capacitor plate;
- filling the first set of vias with conductive posts electrically coupling to the first capacitor plate;
- and
- forming a patterned metallization electrically coupling the conductive posts to form a low resistivity coupling to the first capacitor plate.
Dependencies are inferred from the claim text.