Process and device for drying disk-like objects
AssigneeSEZ Semiconductor-Equipment Zubenor fur die Habbleiterfertigung
InventorHans-Jurgen Kruwinus
Life of this patent
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Abstract
A process for producing a drying gas for drying one or more disk-like objects, in which a carrier gas and an active substance are mixed, as well as a drying process that uses the drying gas that is produced in this manner. Also, a drying-gas production device that is suitable for mixing a carrier gas and an active substance.
Claims29
Process for the production of a drying gas for drying one or more disk-like objects, in which a carrier gas and an active substance are mixed, wherein the carrier gas comes into contact with the still surface of the liquid and in so doing becomes enriched with the gas of the active substance located above the liquid.
Device for producing the drying gas for drying one or more disk-like objects, whereby said device is suitable for mixing a carrier gas and an active substance, wherein the device consists of a container with a first lower area to receive the active substance (3) and a second upper area (4) and wherein an opening (5) in container (1) is connected via a first line to a gas source (7) for the carrier gas and a second opening (8) is connected via a second line (9) to location (10) where the drying gas comes into contact with the surface of disk-like object (11), and wherein the two openings are located in second upper area (4) of the container (1).
A process for production of a drying gas for drying one or more disk-like objects, comprising the steps of:
- providing a container partially filled with an active substance in liquid form, the container having an inlet port and an outlet port, both the inlet port and the outlet port being located above a surface level of the active substance;
- and
- injecting a carrier gas into the inlet port so that the carrier gas comes into contact with the surface of the liquid active substance, thereby enriching the carrier gas with gas of the active substance;
- wherein an entirety of the surface of the liquid active substance is still.
A process for drying disk-like objects comprising the steps of:
- providing a container partially filled with an active substance in liquid form, the container having an inlet port and an outlet port, both the inlet port and the outlet port being located above a surface level of the active substance;
- injecting a carrier gas into the inlet port so that the carrier gas comes into contact with the surface of the liquid active substance, thereby enriching the carrier gas with gas of the active substance, wherein an entirety of the surface of the liquid active substance is still;
- spinning the disk-like object and blowing the enriched carrier gas received from the outlet port of the container onto a surface of the disk-like object while the disk-like object is spinning.
A device for drying at least one disk-like object comprising:
- a container partially filled with an active substance in liquid form, the container having an inlet port and an outlet port, both the inlet port and the outlet port being located above a surface level of the active substance;
- a carrier gas source connected to the inlet port of the container;
- a nozzle connected to the outlet port of the container;
- a rotating support for the disk-like object positioned so that the carrier gas enriched with the active substance blown by the nozzle is directed toward a surface of the disk-like object.
Dependencies are inferred from the claim text.