Back to results
US 6,370,791 B1Granted
Processing machine with lockdown rotor
AssigneeSemitool, Inc.
InventorsRobert Weaver, Ronald Schlagenhauser
Life of this patent
Estimating the term…
Abstract
In a machine for processing semiconductor wafers, a rotor includes two pairs of combs. A lock down mechanism has a lock bar, temporarily engaged and moved by a loading/unloading robot, drives a retainer against the edges of the wafers, to better hold them in place during processing. Contamination via generation of particles is reduced. Combs on the rotor have a resilient strip. The lower edges of the wafers compress slightly into or deflect the resilient strip, when urged into place by the lock down mechanism.
Claims20
A machine for processing flat media, comprising:
- a first section for receiving flat media;
- a second section having at least one process chamber for processing the flat media;
- a robot movable between the first and second sections;
- a rotor rotatably mounted in the at least one process chamber, the rotor comprising a front ring, a lock bar pivotably attached to the front ring, and having a drive stem engageable by the robot, and a retainer pivotably attached to the front ring, and biased into engagement with the lock bar.
1 more element
A machine for processing flat media, comprising:
- a first section for receiving flat media;
- a second section having at least one process chamber for processing the flat media;
- a robot movable between the first and second sections:
- a rotor rotatably mounted in the at least one process chamber, the rotor comprising a front ring, a back plate, a pair of base connecting bars connecting the front ring and the back plate, a pair of base combs on the base connecting bars, a pair of side connecting bars connecting the front ring and back plate, a pair of side combs on the side connecting bars;
- and
- a lock down assembly on the rotor, the lockdown assembly comprising:
- a left lock bar and a right lock bar pivotably attached to the front ring and to the back plate, with the left lock bar having a drive stem linked to a left cam bar and the right lock bar having a drive stem linked to a right cam bar;
- a left retainer and a right retainer pivotably attached to the front ring and to the back plate, with the left retainer and the right retainer having at least one cam arm biased into contact with the left cam bar and the right cam bar, respectively;
- the left retainer and the right retainer removeable, via engagement and movement of the drive stems, from an open position where articles can be loaded and unloaded into and out of the rotor, to a closed position where articles within the rotor are secured into place between the retainers and the combs.
6 more elements
A machine for processing flat media, comprising:
- a first section for receiving flat media;
- a second section having at least one process chamber for processing the flat media;
- a robot movable between the first and second sections;
- a rotor rotatably mounted in the at least one process chamber and having
- a front ring;
- a lock bar pivotably attached to the front ring, the lock bar having a drive stem engageable by a loader/unloader;
- a retainer pivotably attached to the front ring, and biased into engagement with the lock bar;
- and
- at least one cam arm on the retainer, with the cam arm having a cam surface including a first curved surface and a second curved surface adjoining the first curved surface.
6 more elements
A machine for processing flat media, comprising:
- a first section for receiving flat media;
- a second section having at least one process chamber for processing the flat media;
- a robot movable between the first and second sections;
- a rotor rotatably mounted in the at least one process chamber, the rotor comprising:
- combs for supporting the flat media;
- a contact bar having a cam surface with first and second curved surfaces, the contact bar engageable at least indirectly by the robot, and moveable from a first position, where flat media can be placed into or removed from the rotor, to a second position, where the contact bar engages the flat media to secure it into place against the combs;
- and
- a lock bar engaged against the cam surface.
5 more elements
A machine for processing flat media, comprising:
- a first section for receiving flat media;
- a second section having at least one process chamber for processing the flat media;
- a rotor in the at least one process chamber, the rotor comprising lock down means for securing flat media into place within the rotor, the lock down means comprising a lock down assembly including:
- a left lock bar having a drive stem linked to a left cam bar;
- a right lock bar having a drive stem linked to a right cam bar;
- a left retainer and a right retainer, with the left retainer and the right retainer having at least one cam arm biased into contact with the left cam bar and the right cam bar, respectively;
- the left retainer and the right retainer moveable, via engagement and movement of the drive stems, from an open position, where, articles can be loaded and unloaded into and out of the rotor, to a closed position where articles within the rotor are secured into place between the retainers and the combs;
- and
- transport means for moving flat media into and out of the rotor.
6 more elements
A machine for processing flat media, comprising:
- a first section for receiving flat media;
- a second section having at least one process chamber for processing the flat media;
- a robot movable between the first and second sections;
- a rotor rotatably mounted in the at least one process chamber, the rotor comprising:
- a contact bar moveable from a first position, where flat media can be placed into or removed from the rotor, to a second position, where the contact bar engages the flat media to secure it into place within the rotor;
- and
- a lock bar engaged against a cam surface on the contact bar for urging the contact bar from the first position to the second position.
4 more elements
A machine for processing flat media, comprising:
- a first section for receiving flat media;
- a second section having at least one process chamber for processing the flat media;
- a robot moveable from the first section to the second section;
- a rotor in the at least one process chamber, the rotor comprising contact means moveable from a first position, where flat media can be placed into or removed from the rotor, to a second position, where the contact means engages the flat media to secure it into place within the rotor, and the rotor also comprising a locking means engaged against the contact means for urging the contact means from the first position to the second position, with the locking means engageable by the robot.
1 more element
A machine for processing flat media, comprising:
- a first section for receiving flat media;
- a second section having at least one process chamber for processing the flat media;
- a robot movable between the first and second sections;
- a rotor rotatably mounted in the at least one process chamber, the rotor comprising:
- a contact bar moveable from a first position, where flat media can be placed into or removed from the rotor, to a second position, where the contact bar engages the flat media to secure it into place within the rotor;
- a lock bar engaged against the contact bar for urging the contact bar from the first position to the second position;
- and
- a spring urging the contact bar into engagement with the lock bar.
5 more elements
Dependencies are inferred from the claim text.