Bearing material for porous hydrostatic gas bearing and porous hydrostatic gas bearing using the same

Abstract

A bearing material includes a backing metal and a porous sintered metal layer sintered onto a surface of the backing metal, particles of an inorganic substance being contained at grain boundaries of the porous sintered metal layer. The porous sintered metal layer contains tin, nickel, phosphorus, and copper, and the particles of the inorganic substance are those of at least one of graphite, boron nitride, graphite fluoride, calcium fluoride, aluminum oxide, silicon oxide, and silicon carbide.

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