In line yield prediction using ADC determined kill ratios die health statistics and die stacking

Abstract

A method of manufacturing and inspecting semiconductor devices wherein defects on inspection wafers are tabulated in a stacked defect table wherein a defect table for each layer is generated per die number and a calculated cumulative die health statistic using an automatic defect classification system and a kill ratio for each defect. The cumulative die health statistic is carried over to the next defect table generated for the next layer.

Claims aren’t available for this document.