US 6,337,732 B2 · Exposure apparatus and device manufacturing method using the same in which a door lock mechanism is controlled on the basis of temperature and an operation sequence

Abstract

An exposure apparatus has a maintenance door for an exposure illumination lamp. The apparatus includes a detector for detecting temperature information of the lamp and for outputting the detected temperature information, a confirmation device for confirming a stop of an operation sequence of the exposure apparatus and for outputting a confirmation result and a controller for controlling a lock mechanism of the maintenance door on the basis of the temperature information and the confirmation result.

Claims0

Dependent claims

Claims aren’t available for this document.

Facts

Application

09/337,655Filed 22 Jun 1999

Published

US 2001/0038441 A18 Nov 2001

Granted

8 Jan 2002

Term ends

Not estimatedThe source records don’t support an estimate.

Classification4 codes

G03F 7/70858
Construction of apparatus, e.g. environment aspects, hygiene aspects or materials: environment aspects, e.g. pressure of beam-path gas, temperature
G03B 27/52
Projection printing apparatus, e.g. enlarger, copying camera: details
G03F
Photomechanical production of textured or patterned surfaces
G03B
Apparatus or arrangements for taking photographs or for projecting or viewing them

Exposure apparatus and device manufacturing method using the same in which a door lock mechanism is controlled on the basis of temperature and an operation sequence

Life of this patent

Abstract

Claims0

Exposure apparatus and device manufacturing method using the same in which a door lock mechanism is controlled on the basis of temperature and an operation sequence

Life of this patent

Abstract

Claims0