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US 6,335,206 B1Granted
Integrated capacitor device and method of fabricating the same
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Abstract
A method of fabricating a semiconductor device comprises the steps of forming an insulating layer on a semiconductor substrate including a first layer, forming a through hole in the insulating layer so as to reach for the first layer, charging an oxide dielectric substance into the through hole to form an oxide dielectric section therein, and forming a second layer on the oxide dielectric section.
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