Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization

A method of manufacturing, the method comprising:

• preheating a rapid thermal processing chamber having at least one lamp according to a preheating recipe;
• processing a plurality of workpieces in the rapid thermal processing chamber;
• and
• performing parameter measurements on first and second workpieces of the plurality of workpieces, wherein the parameter measurements indicate that a first lamp power trace of the first workpiece is substantially the same as a second lamp power trace of the second workpiece, reducing processing differences between the first and second workpieces.

A method of manufacturing, the method comprising:

• preheating a rapid thermal processing chamber having a tube and a plurality of lamps heating the tube according to a preheating recipe;
• processing a plurality of workpieces in the tube in the rapid thermal processing chamber;
• and
• performing parameter measurements on first and second workpieces of the plurality of workpieces, wherein the parameter measurements indicate that a first tube temperature trace of the first workpiece at a first start of processing of the first workpiece is higher than a second tube temperature trace of the second workpiece at a second start of processing of the second workpiece and that a first lamp power trace of the first workpiece is substantially the same as a second lamp power trace of the second workpiece, reducing processing differences between the first and second workpieces.