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US 6,320,649 B1Granted
Stage system for exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorsYoshikazu Miyajima, Yukio Tokuda
Life of this patent
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Abstract
A stage system includes a movable stage having a static bearing and a magnet preloading mechanism, and a base having a guiding surface for guiding the movable stage. The base has an accumulated structure including a first layer of a magnetic material provided at the guiding surface, and a second layer of a non-magnetic material.
Claims28
A stage system, comprising:
- a movable stage having a static bearing;
- a magnet preloading mechanism having a magnet and being provided at said movable stage, said magnet preloading mechanism being effective to apply a preload to said movable stage;
- and
- a base having a guiding surface for guiding said movable stage, wherein said base has an accumulated structure including a first layer of a magnetic material provided at the guiding surface side, and a second layer of a non-magnetic material.
1 more element
An exposure apparatus, comprising:
- an exposure device for exposing a substrate;
- a movable stage having a static bearing;
- a magnet preloading mechanism having a magnet and being provided at said movable stage, said magnet preloading mechanism being effective to apply a preload to said movable stage;
- and
- a base having a guiding surface for guiding said movable stage, wherein said base has an accumulated structure having a first layer of a magnetic material provided at the guiding surface side, and a second layer of a non-magnetic material.
2 more elements
Dependencies are inferred from the claim text.