Lever arm for a scanning microscope

A method of producing a lever arm with a tip for a microscope, comprising the steps of:

• providing a single crystal wafer in the form of a lever arm including a tip projecting upwardly from the surface of the lever arm at one end thereof,
• depositing a photolacquer layer on said wafer, whereby the surface of said wafer is covered except for said tip on which the photolacquer layer does not remain,
• exposing an area of said photolacquer layer where a resister is to be formed on said wafer to light and developing said photolacquer layer to form a windows in said area,
• subjecting said wafer to a bombardment of B+-ions for implantation to form a p-doped resist layer in the exposed window area and the tip of said wafer which is not protected by said photolacquer layer,
• removing said photolacquer layer and forming an Si-oxide layer on said wafer,
• depositing a metal layer on said wafer which covers said Si oxide layer and also said tip,
• depositing another photolacquer layer on said metal layer wherein said tip remains again uncovered,
• forming windows into said another photolacquer layer by selective exposure to light where contacts to the resist layer are to be formed and developing those areas,
• etching away the metal in those areas not covered by said another photolacquer layer,
• bombarding the wafer by β+ ions to form p++ doped areas in those areas not protected by said metal layer, and removing the metal layer by a wet chemical procedure.