US 6,319,787 B1Granted

Method for forming a high surface area trench capacitor

AssigneeSiemens Aktiengesellschaft

InventorsGerhard Enders, Matthias Ilg, Dietrich Widmann

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Abstract

A trench capacitor having a substrate with a trench extending therein with a nested, e.g., concentric, conductive regions disposed within the trench. A dielectric material is disposed within the substrate. The dielectric material has portions thereof disposed between the concentric conductive regions to dielectrically electrically separate one of the conductive regions from another one of the conductive regions. The dielectrically separated conductive regions provide a pair of electrodes for the capacitor. Selected ones of the concentric conductive regions are electrically connected to provide one of the electrodes for the capacitor. The substrate has a conductive region therein and one of the concentric conductive regions providing one of the electrodes is electrically connected to the conductive region in the substrate. One of the concentric conductive regions is electrically connected to a conductive region in the substrate through a bottom portion of the trench.

Claims3

Dependent claims

A method for forming a trench capacitor, comprising:

(a) providing a substrate;
(b) forming a trench in the substrate;
(c) disposing a first sacrificial material over the sidewalls of the trench;
(d) disposing a first conductive material over the first sacrificial material to provide a first conductive region;
(e) removing portions of the first sacrificial material to provide a first open region between the sidewalls of the trench and sidewalls of the first conductive material;
(f) lining the sidewalls of the trench and the sidewalls of the first conductive material with a second sacrificial material while proving a second open region between portions of the second sacrificial material disposed over the sidewalls of the trench and portions of the second sacrificial material disposed over the sidewalls of the first conductive region;
(g) introducing a second conductive material into the second open region to provide a second conductive region;
(h) removing the second sacrificial material providing:
(i) a first space between an outer periphery of the first conductive region and an inner periphery of the second conductive region;
and
(ii) a second space between an outer periphery of the second conductive region and the sidewalls of the trench;
(i) lining the outer periphery of the first conductive region and the inner periphery of the second conductive material and the outer periphery of the second conductive material and the sidewalls of the trench with a dielectric material to thereby line with such dielectric material the surfaces forming the first and second spaces;
and
(j) introducing a third conductive material into the lined first and second spaces, such third conductive material being electrically insulated from the first and second conductive materials.

11 more elements

Dependencies are inferred from the claim text.