Method and apparatus for characterizing a semiconductor device
AssigneeAdvanced Micro Devices, Inc.
InventorsGary Gene Putnam, Jennifer Meng-Tzu Cheng, Chin-Yang Sun
Life of this patent
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Abstract
A method and apparatus are provided for providing characterization data for semiconductor devices. A first data set containing measured results obtained from wafer electrical tests performed on the semiconductor device during the fabrication process is compared to a second data set containing values corresponding to design characteristics for the semiconductor device. Based on this comparison, semiconductor devices having valid and invalid performance characteristics are identified. The characterization results data are subsequently generated for the identified semiconductor devices.
Claims22
A computer-readable medium carrying one or more sequences of instructions for generating characterization data for a fabrication process in which semiconductor devices are formed upon at least one wafer, wherein execution of the one or more sequences of instructions by one or more processors causes the one or more processors to perform the steps of:
- receiving a first data set containing measured results obtained from tests performed on the semiconductor devices during the fabrication process;
- receiving a second data set containing values corresponding to design characteristics for the semiconductor devices;
- comparing the measured results from the first data set to the design characteristics from the second data set;
- identifying semiconductor devices having valid and invalid performance characteristics, based on the step of comparing;
- and
- generating the characterization data for the fabrication process based on the identified valid semiconductor devices;
- whereby the characterization data includes proposed limit parameters to which test results from said semiconductor devices will conform.
A system for generating characterization data for a fabrication process comprising:
- a workstation configured to:
- access a first data set containing measured results obtained from tests performed on said semiconductor devices during said fabrication process,
- access a second data set containing values corresponding to design characteristics for said semiconductor devices,
- compare the measured results from said first data set to the design characteristics from said second data set to thereby identify semiconductor devices having valid and invalid performance characteristics, and
- generate said characterization data for the fabrication process based on the identified valid semiconductor devices,
- whereby said characterization data includes proposed limit parameters to which test results from said semiconductor devices will conform;
- and
- a display operatively coupled to said workstation for displaying said characterization data.
Dependencies are inferred from the claim text.