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US 6,319,636 B1Granted
Cell projection mask
AssigneeHyundai Electronics Industries Co., Ltd.
InventorYoung Mog Ham
Life of this patent
Estimating the term…
Abstract
A cell projection mask, comprising: a frame for supporting means; a membrane formed over the frame, for making a stress due to electron beam to maintain balance; and an absorber formed over the membrane, for absorbing or reflecting the electron beam, wherein the absorber is comprised of a silicon layer and includes at least one or more ion implanting layers.
Claims7
A cell projection mask comprising:
- a frame;
- a membrane formed over the frame;
- and
- an absorber formed over the membrane, for absorbing or reflecting an electron beam,
- wherein the absorber is comprised of a silicon layer and includes at least one ion implanted layer in the silicon layer so as to form a barrier for inhibiting an electron beam from penetrating through the absorber such that the thickness of the absorber can be minimized.
2 more elements
Dependencies are inferred from the claim text.