Method of controlling vapor deposition substrate temperature
AssigneeHowmet Research Corporation
InventorsMartin A. Callaway, Robert D. Adair, Kenneth S. Murphy, Theodore J. Maniurski
Life of this patent
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Abstract
Coating temperature during vapor deposition of a ceramic coating on a substrate in a coating box or enclosure is maintained by means of a heat release cover or lid on the coating enclosure and movable in response to temperature in the coating enclosure exceeding a predetermined value so as to release excess heat from the enclosure to maintain coating temperature within an appropriate range.
Claims4
A method of coating a substrate, comprising positioning said substrate in a coating enclosure disposed in an outer chamber, impinging an electron beam on a coating material in said enclosure to form a vapor of said coating material, depositing said coating material on said substrate, and releasing excess heat from said enclosure by moving a cover relative to an opening in said enclosure to open said opening to said outer chamber to release heat from said coating enclosure to said outer chamber to maintain a selected substrate coating temperature range.
Dependencies are inferred from the claim text.