Integrated defect yield management and query system

An integrated defect yield management and query system for a semiconductor fabrication process, comprising:

• a local area network having a communication protocol;
• devices connected to the local area network, for analyzing process defects and process yields of semiconductor wafers during and after the semiconductor fabrication process and providing process records corresponding to the semiconductor wafers, and for monitoring and controlling particle numbers in a semiconductor fabrication environment;
• a defect yield management server, connected to the local area network, for retrieving the process records generated by the analyzing devices through the communication protocol of the local area network, the defect yield management server having a database storing the process records retrieved from the analyzing devices and history records, each of the process records and the history records having fields corresponding to specific defect characteristics of the semiconductor wafers;
• and
• a client device, connected to the local area network, for polling the process records and the history records stored in the database of the defect yield management server.