Vapor deposition apparatus
AssigneeLeybold Systems GmbH
InventorsGünter Klemm, Hans Neudert
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Abstract
A method and apparatus for vapor depositing a release agent on a foil. The foil is wrapped around a cylindrical drum which is made of a porous material. The hollow inside of the drum forms a vapor space. The outer surface of the drum includes a thin metallic layer which has engraved or etched therein a pattern of surface passages. A vaporizer vessel provides a vaporized release agent which is conducted to the vapor space inside the drum. The release agent travels through the circumferential passages so as to be deposited in a pattern on the foil which is wrapped around the drum. A conforming body covers the circumferential surface not covered by the foil and can be heated to heat the drum.
Claims14
An apparatus for vapor depositing a material on a foil comprising:
- a rotatably disposed drum having passages on its circumferential surface for conducting the material to be vapor-deposited;
- said foil partially wrapping around said drum and revolving synchronously therewith;
- a source of vaporized material connected to a vapor space inside said drum which is in communication with said passages;
- a conforming body extending along a portion of said circumferential surface of said drum not covered by said foil;
- wherein said vaporized material is conducted from said vapor space through said passages so as to be vapor deposited on the foil and wherein said vaporized material is prevented from being deposited by the conforming body where the foil is not present.
Dependencies are inferred from the claim text.