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US 6,307,211 B1Granted
Semiconductor alignment tool
AssigneeMicrotool, Inc.
InventorsGordon Haggott Beckhart, Patrick Rooney Conarro, Kevin James Harrell, Michael Charles Krause, Kamran Michael Farivar-Sadri
Life of this patent
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Abstract
A semiconductor alignment tool has a housing that has a number of registration pins for mating with a standard semiconductor cassette. A plurality of x-y axis sensors are embedded in a first surface of the housing.
Claims17
A semiconductor alignment tool, comprising:
- a housing having a plurality of registration pins for mating with a standard semiconductor cassette;
- and
- a plurality of x-y axis sensors embedded in a first surface of the housing.
A semiconductor alignment tool, comprising:
- a housing having a first substantially planar surface and a second substantially planar surface, the first substantially planar surface having a surface area sufficient to hold a standard semiconductor cassette;
- a plurality of screw holes extending through the housing;
- and
- a z-axis sensor embedded in the first substantially planar surface.
1 more element
A semiconductor alignment tool, comprising:
- a platform having a plurality of registration pins capable of mating with a standard semiconductor cassette;
- and
- a sensor attached to the platform.
Dependencies are inferred from the claim text.