Tool for handling a workpiece
AssigneeLucent Technologies Inc.
InventorsJoseph Michael Freund, George John Przybylek, Dennis Mark Romero, John W. Stayt
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Abstract
A system for flipping a semiconductor workpiece on its thin edge for microscope inspection of a workpiece facet is disclosed. The system has a holding device attached to a handling block. The holding device picks a workpiece by one of its thin edges. The edge of the workpiece may be attached to the holding device by vacuum. Then an operator rotates the handling block ninety degrees, which in turn rotates the holding device and workpiece ninety degrees. After rotation, one of the workpiece facets faces upward and perpendicular to the microscope for proper inspection of the facet.
Claims5
A method of inspecting a first edge on a workpiece, said method comprising:
- attaching a second edge of said workpiece to a holding device, said holding device being attached to a handling block;
- and
- while said second edge of said workpiece is attached to said holding device, manipulating said holding device by rotating said handling block to a point where said first edge of said workpiece is perpendicular to an inspection apparatus.
A method of inspecting a facet on a workpiece, said method comprising:
- placing a workpiece on a support surface;
- horizontally attaching said workpiece to a holding device attached to at least two control surfaces;
- and
- while said workpiece is attached to said holding device, applying force to at least one control surface such that said holding device rotates to a point where said facet of said workpiece is perpendicular to an axis of an inspection apparatus.
Dependencies are inferred from the claim text.