Polymers containing oxygen and sulfur alicyclic units and photoresist compositions comprising same
AssigneeShipley Company, L.L.C.
InventorsGeorge G. Barclay, Wang Yueh
Life of this patent
Estimating the term…
Abstract
The invention includes polymers that contain a heterocyclic ring, preferably an oxygen- or sulfur-containing ring. The heterocyclic ring is preferably fused to the polymer backbone. The invention also provides photoresists that contain such polymers, particularly for imaging at short wavelengths such as sub-200 nm.
Claims45
A photoresist composition comprising a photoactive component and a polymer that comprises a photoacid-labile moiety and a structure of the following Formula IB:
- wherein Z′ is oxygen, sulfur or carbon, m′ is 1, 2, 3 or 4;
- Q represents an optionally substituted carbon alicyclic ring with two ring members being adjacent carbons of the polymer backbone;
- each R is the same or different non-hydrogen substituent;
- n is an integer of from 0 to the maximum value permitted by the valences of the ring members;
- p is the mole fraction of the fused oxygen ring units based on the total units in the polymer;
- and r is the mole fraction of the fused carbon units based on total units in the polymer;
- and p and r are each greater than zero.
A photoresist composition comprising a photoactive component and a polymer that comprises a photoacid-labile moiety and a structure of the following Formula IC:
- wherein Z′ is oxygen, sulfur or carbon, m′ is 1, 2, 3 or 4;
- each R is the same or different non-hydrogen substituent;
- n is an integer of from 0 to the maximum value permitted by the valences of the ring members;
- R1 and R2 are each independently hydrogen or a non-hydrogen substituent;
- p is the mole fraction of the fused oxygen ring units based on total units in the polymer;
- and r is the mole fraction of the fused carbon units based on total units in the polymer, and p and r are each greater than zero.
A photoresist composition comprising a photoactive component and a polymer that comprises:
- i) a heteroalicyclic group fused to the polymer backbone and that contains one or more sulfur ring members;
- ii) a carbon alicyclic group fused to the polymer backbone;
- and iii) a photoacid-labile moiety.
Dependencies are inferred from the claim text.