Clean room
AssigneeM+W Zander Facility Engineering GmbH
InventorManfred Renz
Life of this patent
Estimating the term…
Abstract
A clean room is provided through which clean air/recirculated air flow, and which comprises at least one processing unit and/or processing surface to which is supplied a gaseous medium of known composition, wherein the gaseous medium can be supplied to the clean room separately.
Claims21
A clean room through which clean air/recirculated air flow, comprising at least one processing unit and/or processing surface to which is supplied a gaseous medium of known composition and a flow chamber, wherein said gaseous medium is supplied to said clean room separately from said recirculated air and wherein said flow chamber directly provides said gaseous medium to said at least one processing unit and/or processing surface, wherein said flow chamber is formed by walls that separate the processing unit an/or processing surface from the clean air/recirculated air flow in the clean room in such a way that the gaseous medium does not come in contact with clean air within the clean room.
Dependencies are inferred from the claim text.