Reticle having assist feature between semi-dense lines
AssigneeUnited Microelectronics Corp.
InventorChin-Lung Lin
Life of this patent
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Abstract
A reticle having an assist feature between semi-dense lines is described. The reticle has two adjacent, substantially parallel, and substantially equally spaced line segments of which each representing a portion of a main feature having a line width, between two adjacent line segments of the group having a gap space, wherein the gap-space/line-width ratio is equal to about 3-6.5. Between the two adjacent line segments, at least one inside assist feature is located. At the outside edges of the extreme left-hand and right-hand line segments, two outside assist features are located, respectively, wherein each of the two assist features has a first width and is spaced apart from the nearest line segment by a distance.
Claims16
A reticle having two adjacent, substantially parallel, and substantially equally spaced line segments of which each representing a portion of a main feature having a line width, between two adjacent line segments of the group having a gap space, the reticle comprises:
- two outside assist features respectively located at the outside edges of the extreme left-hand and right-hand line segments, wherein each of the two assist features has a first width and is spaced apart from the nearest line segment by a distance;
- and
- at least one inside assist feature located between the two adjacent line segments, if the gap-space/line-width ratio is equal to about 3-6.5.
A reticle comprises a group of parallel and substantially equally spaced line segments of which each representing a portion of a main feature having a line width, between two adjacent line segments of the group having a gap space, wherein the gap-space/line-width ratio is substantially over 3, which reticle further comprises:
- at least one inside assist feature located between the two adjacent line segments;
- and
- two outside assist features respectively located at the outside edges of the extreme left-hand and right-hand line segments, wherein each of the two assist features has a first width and is spaced apart from the nearest line segment by a distance.
Dependencies are inferred from the claim text.