Lubricant delivery for micromechanical devices
AssigneeTexas Instruments Incorporated
InventorsRoger A. Robbins, Simon Joshua Jacobs
Life of this patent
Estimating the term…
Abstract
A method of dispensing a lubricant into a micromechanical device package and a micromechanical device package containing the lubricant. The method comprises the steps of mixing (102) the lubricant, typically a perfluoroalkanoic acid such as perfluorodecanoic acid with a suitable solvent, typically an ether solvent such as tetrahydrofuran or tert-butyl methyl ether. The mixture is allowed to equilibriate (104) before being filtered (106) to remove solid particles. The filtered solution is applied (108) to a surface that will be on the interior of the package, typically the ceramic substrate. The deposited mixture is then cured (110) to remove most, if not all, of the solvent, and the package is sealed (112).
Claims17
A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:
- mixing said lubricant with a suitable solvent;
- applying said lubricant and solvent mixture to an interior surface of said micromechanical device package;
- sealing said micromechanical device package;
- and
- baking said sealed micromechanical device package to distribute said lubricant.
A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:
- mixing a carboxylic acid lubricant with a suitable solvent;
- applying said lubricant and solvent mixture to an interior surface of said micromechanical device package;
- sealing said micromechanical device package;
- and
- baking said sealed micromechanical device package to distribute said lubricant.
A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:
- mixing a perfluoroalkanoic acid lubricant with a suitable solvent;
- applying said lubricant and solvent mixture to an interior surface of said micromechanical device package;
- sealing said micromechanical device package;
- and
- baking said sealed micromechanical device package to distribute said lubricant.
A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:
- mixing perfluorodecanoic acid lubricant with a suitable solvent;
- applying said lubricant and solvent mixture to an interior surface of said micromechanical device package;
- sealing said micromechanical device package;
- and
- baking said sealed micromechanical device package to distribute said lubricant.
A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:
- mixing a perfluoroalkanoic acid lubricant with an ethereal solvent;
- applying said lubricant and solvent mixture to an interior package surface;
- curing said lubricant and solvent mixture to remove at least some of said solvent;
- and
- sealing said micromechanical device package.
A method applying a lubricant to a micromechanical device package, the method comprising the steps of:
- mixing said lubricant with a suitable solvent;
- applying said lubricant and solvent mixture to an interior surface of said micromechanical device package;
- sealing said micromechanical device package;
- and
- baking said sealed micromechanical device package to evaporate said lubricant.
A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:
- mixing a carboxylic acid lubricant with a suitable solvent;
- applying said lubricant and solvent mixture to an interior surface of said micromechanical device package;
- sealing said micromechanical device package;
- and
- baking said sealed micromechanical device package to evaporate said lubricant.
A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:
- mixing a perfluoroalkanoic acid lubricant with a suitable solvent;
- applying said lubricant and solvent mixture to an interior surface of said micromechanical device package;
- sealing said micromechanical device package;
- and
- baking said sealed micromechanical device package to evaporate said lubricant.
A method of applying a lubricant to a micromechanical device package, the method comprising the steps of:
- mixing perfluorodecanoic acid lubricant with a suitable solvent;
- applying said lubricant and solvent mixture to an interior surface of said micromechanical device package;
- sealing said micromechanical device package;
- and
- baking said sealed micromechanical device package to evaporate said lubricant.
Dependencies are inferred from the claim text.