US 6,297,723 B1 · Temperature sensor and method of manufacturing the same

Abstract

A low cost high-performance temperature sensor that can be manufactured of a thin-film temperature detecting element with high yield. The temperature sensor has a metal cylinder (10); a ceramic substrate (2) placed in the metal cylinder and a temperature detecting element (3) and film electrodes (94) connected with the output of the temperature detecting element (3); an inorganic filer (95) for absorbing stress to hold the ceramic substrate (2) inside the metal cylinder (1); and a cap (6), provided on one end of the metal cylinder (1), for protecting the temperature detecting element (30) on the ceramic substrate (2). One end of the ceramic substrate is fixed to a first end of a terminal (27) which is U-shaped, and the terminal includes an expansion and contraction absorbing portion (20) between a first and second end.

Claims23

Dependent claims

A temperature sensor comprising:

a metal cylinder;
a ceramic substrate inserted into said metal cylinder;
a temperature detecting element in a form of a film disposed near a first end of said ceramic substrate;
an electrode in a form of a film electrically coupled to said temperature detecting element and;
a terminal,
wherein a first end of said terminal is electrically connected to an end of said electrode,
a second end of said ceramic substrate is fixed to said first end of said terminal and said terminal includes an expansion and contraction absorbing portion disposed between a second end and said first end of said terminal, said first end of said terminal being in a U-shape and said first end of said ceramic substrate being disposed in and fixed to said metal cylinder.

4 more elements

Dependencies are inferred from the claim text.

Temperature sensor and method of manufacturing the same

Life of this patent

Temperature sensor and method of manufacturing the same

Life of this patent

Abstract

Claims23