Test system for testing semiconductor device
AssigneeNEC Corporation
InventorYumi Saito
Life of this patent
Estimating the term…
Abstract
In a test system, a plurality of semiconductor devices (samples) to be tested are connected in parallel. Resistors and switches are connected to the respective semiconductor devices in series. A voltage source (power supply) supplies a constant voltage for the respective semiconductor devices. An ammeter measures current that flows through the respective semiconductor devices. A voltmeter measures the respective voltage drops of the resistors. A controller detects the specific resistor that is changed in a resistance value when the current measured by the ammeter is reduced, and turns off the switch connected to the specific resistor.
Claims8
A test system for testing a semiconductor device, comprising:
- a plurality of semiconductor devices which are connected in parallel and which are to be tested;
- resistors which are connected to the respective semiconductor devices in series;
- switches which are connected to the respective resistors in series;
- a voltage source which supplies a constant voltage for the respective semiconductor devices;
- an ammeter which measures current that flows through the respective semiconductor devices from the voltage source;
- a voltmeter which measures the respective voltage drops of the resistors;
- and
- a controller which is connected to the switches, the voltage source and the ammeter and which detects the specific resistor that is changed in a resistance value when the current measured by the ammeter is reduced and which turns off the switch connected to the specific resistor,
- wherein the resistance value is changed by electromigration,
- elapsed time until the detection of the specific resistor from the test starting time is defined as lifetime of the semiconductor device connected to the specific resistor, and
- the current value for the elapsed time is changed in a step-wise manner.
A test system for testing a semiconductor device comprising:
- a plurality of semiconductor devices which are connected in parallel and which are to be tested;
- resistors which are connected to the respective semiconductor devices in series;
- switches which are connected to the respective resistors in series;
- a voltage source which supplies a constant voltage for the respective semiconductor devices;
- an ammeter which measures current that flows through the respective semiconductor devices from the voltage source;
- a voltmeter which measures the respective voltage drops of the resistors;
- and
- a controller which is connected to the switches, the voltage source and the ammeter and which detects the specific resistor that is changed in a resistance value when the current measured by the ammeter is reduced and which turns off the switch connected to the specific resistor,
- wherein the semiconductor devices and the resistors are integrated in an integrated circuit,
- the integrated circuit has a first electrode pad, a second electrode pad, a third electrode pad, and a fourth electrode pad,
- the semiconductor devices and the resistors are connected between the first electrode pad and the second electrode pad,
- the first electrode pad is coupled to the ammeter, the second electrode pad is coupled to the switch and,
- the third electrode pad and the fourth electrode pad are coupled to the voltmeter.
Dependencies are inferred from the claim text.