Piezoelectric/electrostrictive element
AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Tsutomu Nanataki, Masao Takahashi
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AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Tsutomu Nanataki, Masao Takahashi
Estimating the term…
Disclosed is a piezoelectric/electrostrictive element composed of an actuator section of a uni-morph type comprising a main actuator element including a piezoelectric/electrostrictive layer and a pair of electrodes formed on a first principal surface of the piezoelectric/electrostrictive layer; a vibrating section which contacts with a second principal surface of the piezoelectric/electrostrictive layer for supporting the main actuator element; and a fixed section for supporting the vibrating section in a vibrative manner; wherein a relationship of y=ax is satisfied, and an expression of {fraction (1/10)}≦a≦100 is satisfied provided that x represents a distance between the pair of electrodes (1 μm≦x≦200 μm), and y represents a thickness of the piezoelectric/electrostrictive layer (1 μm≦y≦100 μm). Accordingly, it is possible to greatly increase the relative displacement amount between the no-voltage-loaded state and the voltage-applied state and the relative displacement amount between the states in which mutually opposite electric fields are applied, making it possible to realize easy control when the element is utilized for actuators and improvement in sensitivity when the element is utilized for sensors.
A method of driving a piezoelectric/electrostrictive element, comprising the steps of:
A method of driving a piezoelectric/electrostrictive element, comprising the steps of:
Dependencies are inferred from the claim text.