Piezoelectric actuator
AssigneeAgilent Technologies, Inc.
InventorsTak K. Wang, Clayton E. Law
Life of this patent
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Abstract
An actuator assembly having a first and a second stack of piezoelectric materials having electrode layers connecting the stacks to a voltage source. A cavity is defined within said first stack and is adapted to receive a first end of the second stack. A first opening and a second opening are defined within the stack wherein each is in fluid communication with the cavity and wherein the first opening has a flat surface within the cavity. A flat face opposite the first opening forms a contact seal with the flat surface. The first and second stacks are adapted to unseal the face from the surface in response to a voltage.
Claims27
An actuator assembly, comprising
- a first and a second stack of piezoelectric materials having electrode layers connecting said stacks to a voltage source;
- a cavity defined within said first stack adapted to receive a first end of said second stack
- a first opening and a second opening defined within said first stack and in fluid communication with said cavity wherein said first opening has a flat surface within said cavity;
- a flat face opposite said first end for forming a contact seal with said flat surface;
- and
- said first and second stacks are adapted to unseal said flat face from said flat surface in response to a voltage from said voltage source.
An array of actuator assemblies, comprising:
- at least one row having a plurality of actuator assemblies wherein each actuator assembly comprises:
- a first and a second stack of piezoelectric materials having electrode layers connecting said stacks to a voltage source;
- a cavity defined within said first stack adapted to receive a first end of said second stack
- a first opening and a second opening defined within said first stack and in fluid communication with said cavity wherein said first opening has a flat surface within said cavity;
- a flat face opposite said first end for forming a contact seal with said flat surface;
- and
- said first and second stacks are adapted to unseal said flat face from said flat surface in response to a voltage from said voltage source.
Dependencies are inferred from the claim text.