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US 6,296,735 B1Granted
Plasma treatment apparatus and method for operation same
AssigneeUnaxis Balzers Aktiengesellschaft
InventorsAlexander Marxer, Andreas Meyerhans, Fredy Zuend
Life of this patent
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Abstract
An apparatus for plasma treating workpieces in vacuum comprises a stack of plasma chambers (20). Handling of workpieces to and from the plasma chambers of the stack is performed in parellelism by one handling device and through lateral handling openings of the plasma chambers. The handling device is rotatable around an axis parallel to the handling openings of the plasma chambers and comprises transport means simultaneously movable radially with respect to the axis of rotation towards and from the handling openings.
Claims24
Apparatus for vacuum plasma treatment, comprising
- at least one treatment station with at least two substrate carriers stacked one above the other and in vertical alignment, further with at least two sealably closable handling openings vertically in mutual alignment and substantially horizontally aligned with respective ones of said at least two carriers,
- a transport chamber communicating with said station via said handling openings and comprising a transport robot drivingly rotatable around a vertical axis in said transport chamber and comprising at least two substrate supports being vertically aligned and extending horizontally and substantially aligned with said at least two carriers respectively and being radially movable with respect to said axis.
Dependencies are inferred from the claim text.