Method of forming an insulating layer pattern in a liquid crystal display

Abstract

A method of forming an insulating layer pattern in a liquid crystal display which enables the formation of an insulating layer pattern on a substrate under a low temperature without the need of expensive equipment and complicated processes, wherein the formation speed of the insulating layer is accelerated. The method includes the steps of forming an organic thin layer containing silicon on an insulated substrate, exposing the thin layer to a gaseous ambience including, oxygen, generating a plurality of oxygen radicals and silicon radicals by applying ultraviolet rays to the thin layer using a mask having a predetermined pattern, forming an insulating layer by reacting the silicon radicals with the oxygen radicals, and defining an insulating layer pattern by removing a portion of the thin layer free of the ultraviolet rays.

Dependencies are inferred from the claim text.