Polishing device

A polishing apparatus comprising:

• a turntable having a polishing cloth on an upper surface thereof;
• a top ring to press under a certain pressing force a workpiece, to be positioned between said turntable and said top ring, toward said turntable to thus polish the workpiece;
• a presser ring vertically movably provided around said top ring;
• a pressing device to press said presser ring against said polishing cloth under a variable pressing force;
• and
• an abrasive liquid supply to supply abrasive liquid inside of said presser ring, said abrasive liquid supply including a cleaning device to allow abrasive liquid flowing through said abrasive liquid supply to be washed away.

A polishing apparatus comprising:

• a turntable having a polishing cloth on an upper surface thereof;
• a top ring to press under a certain pressing force a workpiece, to be positioned between said turntable and said top ring, toward said turntable to thus polish the workpiece;
• a presser ring vertically movably provided around said top ring;
• a pressing device to press said presser ring against said polishing cloth under a variable pressing force;
• and
• an abrasive liquid supply to supply abrasive liquid inside of said presser ring, said abrasive liquid supply comprising an abrasive liquid supply hole passing through a wall of said presser ring, an abrasive liquid supply tube connected to said abrasive liquid supply hole, and an abrasive liquid supply source connected to said abrasive liquid supply tube.

A polishing apparatus comprising:

• a turntable having a polishing cloth on an upper surface thereof;
• a top ring to press under a certain pressing force a workpiece, to be positioned between said turntable and said top ring, toward said turntable to thus polish the workpiece;
• a presser ring vertically movably provided around said top ring;
• a pressing device to press said presser ring against said polishing cloth under a variable pressing force;
• an abrasive liquid supply to supply abrasive liquid inside of said presser ring;
• and
• a cleaning liquid supply device to supply cleaning liquid to a gap between said top ring and said presser ring.

A polishing apparatus comprising:

• a table having a polishing surface thereon;
• a top ring to press under a certain pressing force a workpiece, to be positioned between said table and said top ring, toward said table to thus polish the workpiece;
• a presser ring vertically movably provided around said top ring;
• a bearing supporting said presser ring on said top ring;
• and
• a pressing device to press said presser ring against said polishing surface under a variable pressing force.

A polishing apparatus comprising:

• a table having a polishing surface thereon;
• a top ring to press under a certain pressing force a workpiece, to be positioned between said table and said top ring, toward said table to thus polish the workpiece;
• a presser ring vertically movably provided around said top ring;
• a pressing device to press said presser ring against said polishing surface under a variable pressing force;
• and
• an abrasive liquid supply to supply abrasive liquid inside of said presser ring, said abrasive liquid supply including a cleaning device to allow abrasive liquid flowing through said abrasive liquid supply to be washed away.

A polishing apparatus comprising:

• a table having a polishing surface thereon;
• a top ring to press under a certain pressing force a workpiece, to be positioned between said table and said top ring, toward said table to thus polish the workpiece;
• a presser ring vertically movably provided around said top ring;
• a pressing device to press said presser ring against said polishing surface under a variable pressing force;
• and
• an abrasive liquid supply to supply abrasive liquid inside of said presser ring, said abrasive liquid supply comprising an abrasive liquid supply hole passing through a wall of said presser ring, an abrasive liquid supply tube connected to said abrasive liquid supply hole, and an abrasive liquid supply source connected to said abrasive liquid supply tube.

A polishing apparatus comprising:

• a table having a polishing surface thereon;
• a top ring to press under a certain pressing force a workpiece, to be positioned between said table and said top ring, toward said table to thus polish the workpiece;
• a presser ring vertically movably provided around said top ring;
• a pressing device to press said presser ring against said polishing surface under a variable pressing force;
• an abrasive liquid supply to supply abrasive liquid inside of said presser ring;
• and
• a cleaning liquid supply device to supply cleaning liquid to a gap between said top ring and said presser ring.