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US 6,293,854 B1Granted
Dresser for polishing cloth and manufacturing method therefor
AssigneeThe Read Corporation
InventorsKenichi Kimura, Moriyasu Kanenari
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AssigneeThe Read Corporation
InventorsKenichi Kimura, Moriyasu Kanenari
Estimating the term…
The present invention provides a dresser for a chemical and mechanical polishing cloth wherein a bonding material for retaining diamond grit is not dissolved and contamination of chemical slurry caused by dissolving of metal or peeling-off of diamond grit is prevented from occurring. A sintered product constituting the dressing face 2a is obtained by mixing a bonding material 4 consisting of silicon and/or silicon alloy with diamond grit 3, and forming and sintering the mixture. A carbide film 5 generated by sintering silicon in the bonding material into diamond is formed on the surface of the diamond grit 3. Thereby, the diamond grit is firmly bonded with the bonding material, and the bonding material is not dissolved. As a result, the contamination of the chemical slurry or the peeling-off of the diamond grit is prevented.
A dresser for a polishing cloth, wherein a dressing face thereof comprises a sintered product obtained by mixing a bonding material comprising silicon or silicon alloy or both with diamond grit, and forming and sintering the mixture;
A dresser for a polishing cloth, wherein a dressing face thereof comprises a sintered product obtained by mixing a bonding material comprising silicon or silicon alloy or both with diamond grit coated with a carbide film of a metal of group IV, V or VI of the periodic table;
A method of manufacturing a dresser for a polishing cloth, which comprises generating a carbide film by sintering diamond grit into silicon in the bonding material on the surface of said diamond grit, mixing the bonding material comprising silicon or silicon alloy or both with diamond grit, and forming and sintering the mixture, and the sintering product for dressing, whereby said diamond grit is bonded with the bonding material by the carbide film.
A method of manufacturing a dresser for a polishing cloth, which comprises mixing silicon or silicon alloy or both with diamond grit coated with a carbide film of a metal of group IV, V, or VI of the periodic table, forming and sintering the mixture, thereby bonding the sintered product for dressing with the bonding material by the carbide film.
Dependencies are inferred from the claim text.